Laser ablation of silicon induced by a femtosecond optical vortex beam.

نویسندگان

  • Jijil J J Nivas
  • He Shutong
  • K K Anoop
  • A Rubano
  • R Fittipaldi
  • A Vecchione
  • D Paparo
  • L Marrucci
  • R Bruzzese
  • S Amoruso
چکیده

We investigate laser ablation of crystalline silicon induced by a femtosecond optical vortex beam, addressing how beam properties can be obtained by analyzing the ablation crater. The morphology of the surface structures formed in the annular crater surface allows direct visualization of the beam polarization, while analysis of the crater size provides beam spot parameters. We also determine the diverse threshold fluences for the formation of various complex microstructures generated within the annular laser spot on the silicon sample. Our analysis indicates an incubation behavior of the threshold fluence as a function of the number of laser pulses, independent of the optical vortex polarization, in weak focusing conditions.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate

Creation of patterns and structures on surfaces at the micro- and nano-scale is a field of growing interest. Direct femtosecond laser surface structuring with a Gaussian-like beam intensity profile has already distinguished itself as a versatile method to fabricate surface structures on metals and semiconductors. Here we present an approach for direct femtosecond laser surface structuring based...

متن کامل

Ultraviolet femtosecond and nanosecond laser ablation of silicon: ablation efficiency and laser-induced plasma expansion

Femtosecond laser ablation of silicon in air was studied and compared with nanosecond laser ablation at ultraviolet wavelength (266 nm). Laser ablation efficiency was studied by measuring crater depth as a function of pulse number. For the same number of laser pulses, the fs-ablated crater was about two times deeper than the ns-crater. The temperature and electron number density of the pulsed l...

متن کامل

Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams

We report femtosecond laser micromachining of micron-size curved structures using tailored accelerating beams. We report surface curvatures as small as 70 μm in both diamond and silicon, which demonstrates the wide applicability of the technique to materials that are optically transparent or opaque at the pump laser wavelength. We also report the machining of curved trenches in silicon. Our res...

متن کامل

RAPID COMMUNICATION Quantifying the quality of femtosecond laser ablation of graphene

The influence of beam intensity on laser ablation quality and ablation size is experimentally studied on graphene-coated silicon/silicon dioxide substrates. With an amplified femtosecond-pulsed laser system, by systematically decreasing the average power, periodic stripes with decreasing widths are ablated. Histogram analyses of the untouched and ablated regions of scanning electron microscope ...

متن کامل

The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

We experimentally investigate the acoustic characteristic of micro plasma shock wave obtained by femtosecond laser ablation of silicon wafer surface using F-P optical fiber acoustic sensor with anti electromagnetic interference. The experimental results show that each of the femtosecond laser pulse can only produce a plasma shock wave. Under the different femtosecond laser energy, the acoustic ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Optics letters

دوره 40 20  شماره 

صفحات  -

تاریخ انتشار 2015